#pragma GCC optimize(2)
#pragma GCC optimize("Ofast")
#pragma GCC optimize("inline","fast-math","unroll-loops","no-stack-protector")
#pragma GCC diagnostic error "-fwhole-program"
#pragma GCC diagnostic error "-fcse-skip-blocks"
#pragma GCC diagnostic error "-funsafe-loop-optimizations"
// MagicDark
#include <bits/stdc++.h>
#define debug cerr << "\33[32m[" << __LINE__ << "]\33[m "
#define SZ(x) ((int) x.size() - 1)
#define all(x) x.begin(), x.end()
#define ms(x, y) memset(x, y, sizeof x)
#define F(i, x, y) for (int i = (x); i <= (y); i++)
#define DF(i, x, y) for (int i = (x); i >= (y); i--)
using namespace std;
typedef long long ll;
typedef unsigned long long ull;
template <typename T> T& chkmax(T& x, T y) {return x = max(x, y);}
template <typename T> T& chkmin(T& x, T y) {return x = min(x, y);}
template <typename T> T& read(T &x) {
	x = 0; int f = 1; char c = getchar();
	for (; !isdigit(c); c = getchar()) if (c == '-') f = - f;
	for (; isdigit(c); c = getchar()) x = (x << 1) + (x << 3) + (c ^ 48);
	return x *= f;
}
const int N = 1e6 + 10, M = 1.7e4 + 10, K = 5e6 + 10, MOD = 1e9 + 7, W = 14, H = 13;
inline int& add(int &x, ll y) {return x = (x + y) % MOD;}
int n, a[N], b[M], f[M], ans, pw3[W + 1], t[W];
struct xxj {
	int info[W + 1], cnt;
	bool ins(int x) {
		DF(i, W, 0)
			if (x & (1 << i)) {
				if (!info[i]) {
					cnt++;
					info[i] = x;
					return true;
				}
				x ^= info[i];
			}
		return false;
	}
	bool check(int x) {
		DF(i, W, 0)
			if (x & (1 << i)) {
				if (!info[i]) return false;
				x ^= info[i];
			}
		return true;
	}
} g[K];
int s[K], pw2[N];
int fac[N], ifac[N], inv[N];
inline void binom(int x) {
	fac[0] = ifac[0] = inv[1] = 1;
	F(i, 2, x) inv[i] = (ll) (MOD - MOD / i) * inv[MOD % i] % MOD;
	F(i, 1, x) fac[i] = (ll) fac[i - 1] * i % MOD, ifac[i] = (ll) ifac[i - 1] * inv[i] % MOD;
}
inline int C(int x, int y) {return x < y || y < 0 ? 0 : (ll) fac[x] * ifac[y] % MOD * ifac[x - y] % MOD;}
signed main() {
	read(n);
	binom(n);
	pw2[0] = 1;
	F(i, 1, n) b[read(a[i])]++, pw2[i] = 2 * pw2[i - 1] % MOD;
	// F(i, 0, (1 << W) - 1)
	// 	for (int j = 1; j <= b[i]; j += 2)
	// 		add(ans, MOD - C(b[i], j));
	pw3[0] = 1;
	F(i, 1, W) pw3[i] = 3 * pw3[i - 1];
	// debug << ans << endl;
	DF(i, pw3[W] - 1, 0) {
		bool flag = true, ff = false;
		int h = 0, hh = 0, s2 = 0;
		F(j, 0, H) {
			t[j] = i / pw3[j] % 3, ff |= t[j] == 2;
			if (!t[j]) h |= 1 << j;
			if (t[j] == 2) s2++;
			if (t[j] != 1) hh |= 1 << j;
		}
		F(j, 0, H) {
			if (t[j] == 0) {
				int a = i + pw3[j], b = i + pw3[j] * 2;
				g[i] = g[a];
				F(k, 0, W)
					if (g[b].info[k]) g[i].ins(g[b].info[k]);
				flag = false;
				s[i] = s[a] + s[b];
				break;
			}
		}
		if (flag) {
			int w = 0;
			F(j, 0, H)
				if (t[j] == 2) w |= 1 << j;
			// if (b[w]) {
			s[i] = b[w];
			F(_, 1, s[i])
				if (!g[i].ins(w | (1 << W))) break;
			// }
			// if (!h) 
			add(ans, MOD - 1);
		}
		// if (!ff) {
		if (g[i].check(hh | (1 << W))) {
			// F(j, 0, H) cout << t[j] << ' '; cout << '\n';
			// debug << h << ' ' << pw2[s[i] - g[i].cnt] << endl;
			if (s2 % 2 == 0) add(ans, pw2[s[i] - g[i].cnt]);
			else add(ans, MOD - pw2[s[i] - g[i].cnt]);
		}
		// } else {
		// 	if (g[i].check(h | (1 << W))) {
		// 		F(j, 0, H) cout << t[j] << ' '; cout << '\n';
		// 		debug << h << ' ' << pw2[s[i] - g[i].cnt] << endl;
		// 		add(ans, MOD - pw2[s[i] - g[i].cnt]);
		// 	}
		// }
		if (g[i].check(h)) {
			// if (h) {
			// 	// debug << h << " " << g[i].cnt << endl;
			// 	// F(j, 0, H) cout << t[j] << ' '; cout << '\n';
			// 	debug << pw2[s[i] - g[i].cnt] << endl;
			// } else {
			// 	// if (pw2[s[i] - g[i].cnt] > 1) debug << pw2[s[i] - g[i].cnt] - 1 << endl;
			// }
			add(ans, pw2[s[i] - g[i].cnt]);
		}
	}
	cout << ans;
	return 0;
}
/* why?
*/